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Regular Paper
Surface Assessment of Transparent Glass Plate with Wavelength-Modulated Interferometry and Harmonic
Phase-Iterative Method
Sungtae Kim, Yangjin Kim, Naohiko Sugita, Mamoru Mitsuishi
Int. J. Precis. Eng. Manuf.-Smart Tech..
2023;1(1):71-81. Published online January 1, 2023
DOI:
https://doi.org/10.57062/ijpem-st.2022.0059
Cited By 4
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