Surface Assessment of Transparent Glass Plate with Wavelength-Modulated Interferometry and Harmonic Phase-Iterative Method
Sungtae Kim (Kim S), Yangjin Kim (Kim Y), Naohiko Sugita (Sugita N), Mamoru Mitsuishi (Mitsuishi M)
Int. J. Precis. Eng. Manuf.-Smart Tech.. 2023;1(1):71-81. Published online 2023 Jan 1 DOI: https://doi.org/10.57062/ijpem-st.2022.0059
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