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Surface Assessment of Transparent Glass Plate with Wavelength-Modulated Interferometry and Harmonic Phase-Iterative Method |
Sungtae Kim, Yangjin Kim, Naohiko Sugita, Mamoru Mitsuishi |
Int. J. Precis. Eng. Manuf.-Smart Tech.. 2023;1(1):71-81. Published online 2023 January 1 DOI: https://doi.org/10.57062/ijpem-st.2022.0059 |
Surface Assessment of Transparent Glass Plate with Wavelength-Modulated Interferometry and Harmonic Phase-Iterative Method Simultaneous measurement of surface shape and absolute optical thickness of a glass plate by wavelength tuning phase-shifting interferometry Multiple-surface interference fringes analysis basing on wavelength-modulated phase shifting interferometry Enhanced sensitivity to surface plasmon resonance phase in wavelength-modulated heterodyne interferometry Experimental determination of the complex fresnel reflection coefficient of a three-phase system by combination of modulated reflectance spectroscopy and modulated interferometry A novel dual-wavelength iterative method for generalized dual-wavelength phase-shifting interferometry with second-order harmonics Wavelength-shifting interferometry using the frequency-modulated Chirp-Z transform and effective multi-harmonic sampling Wavelength-tuning phase-shifting interferometry of transparent plates using sub-signal frequency correction Thickness profiling of transparent plate using wavelength-tuned phase-shifting analysis Error-compensating phase-shifting algorithm for surface shape measurement of transparent plate using wavelength-tuning Fizeau interferometer |
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