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Cyber-Physical Systems Framework for Predictive Metrology in Semiconductor Manufacturing Process
Jay Lee, Huwei Dong, Dai-Yan Ji, Pradeep Kundu
Int. J. Precis. Eng. Manuf.-Smart Tech.. 2023;1(1):107-113.   Published online 2023 January 1    DOI: https://doi.org/10.57062/ijpem-st.2022.0010

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Cyber-Physical Systems Framework for Predictive Metrology in Semiconductor Manufacturing Process
International Journal of Precision Engineering and Manufacturing-Smart Technology. 2023;1(1):107-113   Crossref logo
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A complementary Cyber-Human Systems framework for Industry 4.0 Cyber-Physical Systems
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Digital Twin-based Cyber-Attack Detection Framework for Cyber-Physical Manufacturing Systems
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Digital Twin-based Cyber-Attack Detection Framework for Cyber-Physical Manufacturing Systems
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Condition Monitoring for Predictive Maintenance
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Feature-based control and information framework for adaptive and distributed manufacturing in cyber physical systems
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Cloud-Enabled Distributed Process Planning
Cloud-Based Cyber-Physical Systems in Manufacturing. 2017;105-123   Crossref logo
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Implications of Cyber-Physical Production Systems on Integrated Process Planning and Scheduling
Procedia Manufacturing. 2019;28:167-173   Crossref logo
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The HORSE framework: A reference architecture for cyber-physical systems in hybrid smart manufacturing
Journal of Manufacturing Systems. 2021;61:461-494   Crossref logo
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Development of A Predictive Maintenance Platform for Cyber-Physical Systems
2019 IEEE International Conference on Industrial Cyber Physical Systems (ICPS). 2019;   Crossref logo
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