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Cyber-Physical Systems Framework for Predictive Metrology in Semiconductor Manufacturing Process |
Jay Lee, Huwei Dong, Dai-Yan Ji, Pradeep Kundu |
Int. J. Precis. Eng. Manuf.-Smart Tech.. 2023;1(1):107-113. Published online 2023 January 1 DOI: https://doi.org/10.57062/ijpem-st.2022.0010 |
Cyber-Physical Systems Framework for Predictive Metrology in Semiconductor Manufacturing Process International Journal of Precision Engineering and Manufacturing-Smart Technology. 2023;1(1):107-113 A complementary Cyber-Human Systems framework for Industry 4.0 Cyber-Physical Systems Digital Twin-based Cyber-Attack Detection Framework for Cyber-Physical Manufacturing Systems Digital Twin-based Cyber-Attack Detection Framework for Cyber-Physical Manufacturing Systems Condition Monitoring for Predictive Maintenance Feature-based control and information framework for adaptive and distributed manufacturing in cyber physical systems An Adaptive Cyber-Physical System Framework for Cyber-Physical Systems Design Automation Cloud-Enabled Distributed Process Planning Implications of Cyber-Physical Production Systems on Integrated Process Planning and Scheduling The HORSE framework: A reference architecture for cyber-physical systems in hybrid smart manufacturing |
This metadata service is kindly provided by CrossRef from May 29, 2014. Int. J. Precis. Eng. Manuf.-Smart Tech. has participated in CrossRef Text and Data Mining service since October 29, 2014. |